Development of a Mems Energy Harvester with High-perfomance Polymer Electrets
نویسنده
چکیده
Recent progress on high-performance polymer electrets based on CYTOP, novel charging methods using soft X-ray and vacuum UV, and development of MEMS energy harvesters are discussed. With the parylene high-aspect-ratio nonlinear springs and high-performance polymer electrets, we have successfully developed a MEMS electret generator for energy harvesting applications. With an acceleration of 1 G, about 4 μW has been obtained for a broad frequency range of 40-70 Hz.
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تاریخ انتشار 2010